Screen printing of thick piezoelectric PZT layers onto silicon
Koch, M, Evans, A G R, Brunnschweiler, A, Harris, N and White, N M (1997) Screen printing of thick piezoelectric PZT layers onto silicon.
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| Item Type: | Other |
|---|---|
| Additional Information: | Address: London |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252502 |
| Date Deposited: | 07 Feb 2000 |
| Last Modified: | 02 Mar 2012 12:38 |
| Contributors: | Koch, M (Author) Evans, A G R (Author) Brunnschweiler, A (Author) Harris, N (Author) White, N M (Author) |
| Date: | 1997 |
| Additional Information: | Address: London |
| Status: | Published |
| Publisher: | IEE Colliquium on Recent Advances in micromachining techniques |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252502 |
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