Screen printing of thick piezoelectric PZT layers onto silicon


Koch, M, Evans, A G R, Brunnschweiler, A, Harris, N and White, N M (1997) Screen printing of thick piezoelectric PZT layers onto silicon.

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Item Type: Other
Additional Information: Address: London
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252502
Date Deposited: 07 Feb 2000
Last Modified: 27 Mar 2014 19:54
Publisher: IEE Colliquium on Recent Advances in micromachining techniques
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252502

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