Piezoresistive silicon V-AFM cantilevers for high-speed imaging
Piezoresistive silicon V-AFM cantilevers for high-speed imaging
Su, Y
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Brunnschweiler, A
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Evans, A G R
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Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
1998
Su, Y
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Su, Y, Brunnschweiler, A, Evans, A G R and Ensell, G J
(1998)
Piezoresistive silicon V-AFM cantilevers for high-speed imaging.
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Published date: 1998
Additional Information:
Eurosensors XII. Chapter: 293
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252509
URI: http://eprints.soton.ac.uk/id/eprint/252509
PURE UUID: 27be3448-307c-4ff4-b3f5-49378e2b0071
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Date deposited: 09 Feb 2000
Last modified: 10 Dec 2021 20:27
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Contributors
Author:
Y Su
Author:
A Brunnschweiler
Author:
A G R Evans
Author:
G J Ensell
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