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Piezoresistive silicon V-AFM cantilevers for high-speed imaging

Piezoresistive silicon V-AFM cantilevers for high-speed imaging
Piezoresistive silicon V-AFM cantilevers for high-speed imaging
Su, Y
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Brunnschweiler, A
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Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Ensell, G J
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Su, Y
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579

Su, Y, Brunnschweiler, A, Evans, A G R and Ensell, G J (1998) Piezoresistive silicon V-AFM cantilevers for high-speed imaging.

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More information

Published date: 1998
Additional Information: Eurosensors XII. Chapter: 293
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252509
URI: http://eprints.soton.ac.uk/id/eprint/252509
PURE UUID: 27be3448-307c-4ff4-b3f5-49378e2b0071

Catalogue record

Date deposited: 09 Feb 2000
Last modified: 10 Dec 2021 20:27

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Contributors

Author: Y Su
Author: A Brunnschweiler
Author: A G R Evans
Author: G J Ensell

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