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Thick film printing of PZT onto Silicon for micromechanical applications

Thick film printing of PZT onto Silicon for micromechanical applications
Thick film printing of PZT onto Silicon for micromechanical applications
Harris, N
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Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Beevy, S
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White, N M
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Evans, A G R
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Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Beevy, S
4dd5bfa4-9756-40fa-a285-f0547183a938
White, N M
ce98ce88-d529-4982-9095-8e88274a523f
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Harris, N, Koch, M, Beevy, S, White, N M and Evans, A G R (2000) Thick film printing of PZT onto Silicon for micromechanical applications.

Record type: Other

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More information

Published date: 9 February 2000
Additional Information: Procceding of MM'98 Ulvik, Norway.
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252510
URI: http://eprints.soton.ac.uk/id/eprint/252510
PURE UUID: 82ce1899-97cd-4411-8db2-7feee9ea134b

Catalogue record

Date deposited: 09 Feb 2000
Last modified: 27 Sep 2021 16:31

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Contributors

Author: N Harris
Author: M Koch
Author: S Beevy
Author: N M White
Author: A G R Evans

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