Hart, M J, Evans, A G R, Amaratunga, G A J, Altrip, J L and Kijek, M (1987) Diffusion measurements and modelling of arsenic in silicon after scanning electron beam annealing.
Record type:
Other
Abstract
Abstracts pp8-11
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More information
Published date: October 1987
Additional Information:
Alvey Club meeting.
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252673
URI: http://eprints.soton.ac.uk/id/eprint/252673
PURE UUID: 22ff4708-e110-4e17-ac6c-631c18237448
Catalogue record
Date deposited: 10 Mar 2000
Last modified: 10 Dec 2021 20:28
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Contributors
Author:
M J Hart
Author:
A G R Evans
Author:
G A J Amaratunga
Author:
J L Altrip
Author:
M Kijek
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