Study of the effect of Boron Doping on the Ageing of Silicon Micromachined Cantilevers


Pember, A, Smith, J G and Kemhadjian, H A (1970) Study of the effect of Boron Doping on the Ageing of Silicon Micromachined Cantilevers. Applied Physics Letters, 66, (5), 577-579.

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Item Type: Other
ISSNs: 0003-6951
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252777
Accepted Date and Publication Date:
Status
1 January 1970UNSPECIFIED
Date Deposited: 20 Mar 2000
Last Modified: 31 Mar 2016 13:53
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252777

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