Study of the effect of Boron Doping on the Ageing of Silicon Micromachined Cantilevers


Pember, A, Smith, J G and Kemhadjian, H A (2000) Study of the effect of Boron Doping on the Ageing of Silicon Micromachined Cantilevers. Applied Physics Letters, 66, (5), 577-579.

Download

Full text not available from this repository.

Item Type: Other
ISSNs: 0003-6951
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252777
Date Deposited: 20 Mar 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252777

Actions (login required)

View Item View Item