Study of the effect of Boron Doping on the Ageing of Silicon Micromachined Cantilevers
Pember, A, Smith, J G and Kemhadjian, H A (2000) Study of the effect of Boron Doping on the Ageing of Silicon Micromachined Cantilevers. Applied Physics Letters, 66, (5), 577-579.
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| Item Type: | Other |
|---|---|
| ISSNs: | 0003-6951 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252777 |
| Date Deposited: | 20 Mar 2000 |
| Last Modified: | 02 Mar 2012 13:18 |
| Contributors: | Pember, A (Author) Smith, J G (Author) Kemhadjian, H A (Author) |
| Date: | 20 March 2000 |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252777 |
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