Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers


Pember, A, Smith, J G and Kemhadjian, H A (1995) Study of the effect of Boron Doping on the ageing of Silicon Micromachined Cantilevers. , (21), 2914.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252778
Date Deposited: 20 Mar 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252778

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