Selective Silicon Epitaxy without Chlorine Chemistry


Starbuck, C M K and Parker, G J (2000) Selective Silicon Epitaxy without Chlorine Chemistry. Research Journal, The University of Southampton, ISBN 0

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252782
Date Deposited: 21 Mar 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252782

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