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Selective Silicon Epitaxy without Chlorine Chemistry

Selective Silicon Epitaxy without Chlorine Chemistry
Selective Silicon Epitaxy without Chlorine Chemistry
University of Southampton
Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Starbuck, C.M.K
a85acc65-f4ee-46aa-a608-817d9993f8fd
Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Starbuck, C.M.K
a85acc65-f4ee-46aa-a608-817d9993f8fd

Parker, G.J. and Starbuck, C.M.K (2000) Selective Silicon Epitaxy without Chlorine Chemistry.

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More information

Published date: 14 April 2000
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252782
URI: http://eprints.soton.ac.uk/id/eprint/252782
PURE UUID: be1f5d5a-19d2-4435-9e34-070fbf5872a8

Catalogue record

Date deposited: 21 Mar 2000
Last modified: 26 Feb 2024 19:33

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Contributors

Author: G.J. Parker
Author: C.M.K Starbuck

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