Selective Silicon Epitaxy without Chlorine Chemistry
Starbuck, C M K and Parker, G J (2000) Selective Silicon Epitaxy without Chlorine Chemistry. Research Journal, The University of Southampton, ISBN 0
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252782 |
| Date Deposited: | 21 Mar 2000 |
| Last Modified: | 02 Mar 2012 12:19 |
| Contributors: | Starbuck, C M K (Author) Parker, G J (Author) |
| Date: | 21 March 2000 |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252782 |
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