Nanometrological Micromachined Artefacts

Ensell, G, Evans, A G R, Farooqui, M, Stedman, M and Haycocks, J A (1992) Nanometrological Micromachined Artefacts. Journal of Micromechanics and Microengineering, 2, (3), 179-180.


Full text not available from this repository.

Item Type: Other
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252807
Accepted Date and Publication Date:
Date Deposited: 23 Mar 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar

Actions (login required)

View Item View Item