Nanometrological Micromachined Artefacts


Ensell, G, Evans, A G R, Farooqui, M, Stedman, M and Haycocks, J A (1992) Nanometrological Micromachined Artefacts. Journal of Micromechanics and Microengineering, 2, (3), 179-180.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252807
Date Deposited: 23 Mar 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252807

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