Free standing silicon crystal microstructures

Ensell, G J (1995) Free standing silicon crystal microstructures. Journal of Micromechanics and Microengineering, 5, (1), 1-4.


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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252815
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Date Deposited: 23 Mar 2000
Last Modified: 27 Mar 2014 19:55
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