Free standing silicon crystal microstructures
Ensell, G J (1995) Free standing silicon crystal microstructures. Journal of Micromechanics and Microengineering, 5, (1), 1-4.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252815 |
| Date Deposited: | 23 Mar 2000 |
| Last Modified: | 01 Mar 2012 10:32 |
| Contributors: | Ensell, G J (Author) |
| Date: | 1995 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252815 |
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