Alignment of mask patterns to crystal orientation
Ensell, G J (1995) Alignment of mask patterns to crystal orientation. , 186-189.
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| Item Type: | Other |
|---|---|
| Additional Information: | Technical Digest of Transducers '95 Eurosensors IX, the 8th International Conference on Solid-State Sensors and Actuators, Stockholm, Sweden. |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252816 |
| Date Deposited: | 23 Mar 2000 |
| Last Modified: | 01 Mar 2012 10:32 |
| Contributors: | Ensell, G J (Author) |
| Date: | June 1995 |
| Additional Information: | Technical Digest of Transducers '95 Eurosensors IX, the 8th International Conference on Solid-State Sensors and Actuators, Stockholm, Sweden. |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252816 |
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