Alignment of mask patterns to crystal orientation


Ensell, G J (1995) Alignment of mask patterns to crystal orientation. , 186-189.

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Item Type: Other
Additional Information: Technical Digest of Transducers '95 Eurosensors IX, the 8th International Conference on Solid-State Sensors and Actuators, Stockholm, Sweden.
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252816
Date Deposited: 23 Mar 2000
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252816

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