Alignment of mask patterns to crystal orientation


Ensell, G J (1995) Alignment of mask patterns to crystal orientation. Sensors and Actuators. A Physical, SNA053, 345-348.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252817
Date Deposited: 23 Mar 2000
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252817

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