Silicon based microelectrodes for neurophysiology fabricated using a gold metalisation/nitride passivation system
Ensell, G J, Banks, D, Ewins, D and Balachandran, W (1996) Silicon based microelectrodes for neurophysiology fabricated using a gold metalisation/nitride passivation system. IEE Journal of Microelectromechancial Systems, 5, (2), 117-121.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252818 |
| Date Deposited: | 23 Mar 2000 |
| Last Modified: | 02 Mar 2012 11:37 |
| Contributors: | Ensell, G J (Author) Banks, D (Author) Ewins, D (Author) Balachandran, W (Author) |
| Date: | 1996 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252818 |
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