Silicon based microelectrodes for neurophysiology fabricated using a gold metalisation/nitride passivation system


Ensell, G J, Banks, D, Ewins, D and Balachandran, W (1996) Silicon based microelectrodes for neurophysiology fabricated using a gold metalisation/nitride passivation system. IEE Journal of Microelectromechancial Systems, 5, (2), 117-121.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252818
Date Deposited: 23 Mar 2000
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252818

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