Micromachined flow sensors by using a piezoresistive cantilever paddle


Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G J (1996) Micromachined flow sensors by using a piezoresistive cantilever paddle. , 717-720.

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Item Type: Other
Additional Information: Proceedings of the 26th ESSDERC, Bologna, Italy.
ISBNs: 286332196
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 252819
Date Deposited: 23 Mar 2000
Last Modified: 02 Mar 2012 13:39
Contributors: Su, Y (Author)
Evans, A G R (Author)
Brunnschweiler, A (Author)
Ensell, G J (Author)
Date: September 1996
Additional Information: Proceedings of the 26th ESSDERC, Bologna, Italy.
Status: Published
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252819

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