Micromachined flow sensors by using a piezoresistive cantilever paddle


Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G J (1996) Micromachined flow sensors by using a piezoresistive cantilever paddle. , 717-720.

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Item Type: Other
Additional Information: Proceedings of the 26th ESSDERC, Bologna, Italy.
ISBNs: 286332196
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252819
Date Deposited: 23 Mar 2000
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252819

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