Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope


Su, Y, Evans, A G R, Brunnschweiler, A, Ensell, G J and Koch, M (1996) Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope. , 1149-1152.

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Item Type: Other
Additional Information: Proceedings of Eurosensors X, Leuven, Belgium.
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252820
Date Deposited: 23 Mar 2000
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252820

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