Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope
Su, Y, Evans, A G R, Brunnschweiler, A, Ensell, G J and Koch, M (1996) Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope. , 1149-1152.
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| Item Type: | Other |
|---|---|
| Additional Information: | Proceedings of Eurosensors X, Leuven, Belgium. |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252820 |
| Date Deposited: | 23 Mar 2000 |
| Last Modified: | 02 Mar 2012 12:38 |
| Contributors: | Su, Y (Author) Evans, A G R (Author) Brunnschweiler, A (Author) Ensell, G J (Author) Koch, M (Author) |
| Date: | September 1996 |
| Additional Information: | Proceedings of Eurosensors X, Leuven, Belgium. |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252820 |
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