Design and Frabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM
Sehr, H, Evans, A G R, Brunnschweiler, A and Ensell, G J (2000) Design and Frabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM. Proceedings of SPIE, 4019
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| Item Type: | Other |
|---|---|
| Additional Information: | Organisation: Proceedings of SPIE, Design, Test, Integration and Packaging of MEMS/MOEMS, Paris France, 9 -11 May |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252840 |
| Date Deposited: | 05 Jul 2001 |
| Last Modified: | 02 Mar 2012 12:57 |
| Contributors: | Sehr, H (Author) Evans, A G R (Author) Brunnschweiler, A (Author) Ensell, G J (Author) |
| Date: | May 2000 |
| Additional Information: | Organisation: Proceedings of SPIE, Design, Test, Integration and Packaging of MEMS/MOEMS, Paris France, 9 -11 May |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252840 |
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