Design and Frabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM


Sehr, H, Evans, A G R, Brunnschweiler, A and Ensell, G J (2000) Design and Frabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM. Proceedings of SPIE, 4019

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Item Type: Other
Additional Information: Organisation: Proceedings of SPIE, Design, Test, Integration and Packaging of MEMS/MOEMS, Paris France, 9 -11 May
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252840
Date Deposited: 05 Jul 2001
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252840

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