Selective Silicon and Silicon-Germanium Grown by LPCVD


Bonar, J M, Parker, G J, Gregory, H J, Xin, J and Ashburn, P (1996) Selective Silicon and Silicon-Germanium Grown by LPCVD.

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Item Type: Other
Additional Information: Organisation: Engineering Materials Post-Graduate Conference Chilworth Manor, Southampton 16 - 17 September 1996
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252854
Date Deposited: 24 Mar 2000
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252854

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