Selective Silicon and Silicon-Germanium Grown by LPCVD
Bonar, J M, Parker, G J, Gregory, H J, Xin, J and Ashburn, P (1996) Selective Silicon and Silicon-Germanium Grown by LPCVD.
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| Item Type: | Other |
|---|---|
| Additional Information: | Organisation: Engineering Materials Post-Graduate Conference Chilworth Manor, Southampton 16 - 17 September 1996 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252854 |
| Date Deposited: | 24 Mar 2000 |
| Last Modified: | 02 Mar 2012 11:56 |
| Contributors: | Bonar, J M (Author) Parker, G J (Author) Gregory, H J (Author) Xin, J (Author) Ashburn, P (Author) |
| Date: | September 1996 |
| Additional Information: | Organisation: Engineering Materials Post-Graduate Conference Chilworth Manor, Southampton 16 - 17 September 1996 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252854 |
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