The University of Southampton
University of Southampton Institutional Repository

Fabrication of free-standing single-crystal silicon nanostructures for the study of thermal transport and defect scattering in low dimensional systems

Fabrication of free-standing single-crystal silicon nanostructures for the study of thermal transport and defect scattering in low dimensional systems
Fabrication of free-standing single-crystal silicon nanostructures for the study of thermal transport and defect scattering in low dimensional systems
Free-standing wire samples have been fabricated that enable low dimensional conducting wires to be examined by transmission electron microscopy (TEM). These structures have been fabricated using a combination of gas-assisted ion beam etching and electron beam lithography, and have cross-sectional dimensions between 70 nm and 1.0 µm, and lengths of up to 50 µm. The free-standing wires have been examined by TEM before and after ion implantation and annealing. The results indicate that no extended defects are created in the wires, even for high doses (1016 cm-3) or high beam energies ( > 50 keV). The reason for this is not fully understood. In addition, the fabrication process has been extended so that low temperature electrical measurements can be performed on the TEM samples. In this way it is hoped eventually to study the role of specific crystalline defects in limiting the electronic and phonon transport.
0021-4922
2675-2679
Potts, A
a3c70ecc-a6ad-4a82-b871-0303479b1020
Williams, D A
eff27f62-d14b-45ba-873b-3f05cdc40f02
Young, R J
333e90a3-3175-44a6-82ab-f543e6e293db
Blaikie, R J
cc2569c1-1d3e-40e7-94d4-a5ff1ec49486
McMahon, R A
77f19a4a-1105-4d3f-b30d-a3768b44d14f
Hasko, D G
81358284-248d-4ab4-9c6b-3728494e550e
Cleaver, J R A
8f983ee2-5bc4-4044-9993-88db7fa6ce09
Ahmed, H
4ebe4b2e-14c1-406d-99a5-88ebc6202e9a
Potts, A
a3c70ecc-a6ad-4a82-b871-0303479b1020
Williams, D A
eff27f62-d14b-45ba-873b-3f05cdc40f02
Young, R J
333e90a3-3175-44a6-82ab-f543e6e293db
Blaikie, R J
cc2569c1-1d3e-40e7-94d4-a5ff1ec49486
McMahon, R A
77f19a4a-1105-4d3f-b30d-a3768b44d14f
Hasko, D G
81358284-248d-4ab4-9c6b-3728494e550e
Cleaver, J R A
8f983ee2-5bc4-4044-9993-88db7fa6ce09
Ahmed, H
4ebe4b2e-14c1-406d-99a5-88ebc6202e9a

Potts, A, Williams, D A, Young, R J, Blaikie, R J, McMahon, R A, Hasko, D G, Cleaver, J R A and Ahmed, H (1990) Fabrication of free-standing single-crystal silicon nanostructures for the study of thermal transport and defect scattering in low dimensional systems. Japanese Journal of Applied Physics, 29 (11), 2675-2679.

Record type: Article

Abstract

Free-standing wire samples have been fabricated that enable low dimensional conducting wires to be examined by transmission electron microscopy (TEM). These structures have been fabricated using a combination of gas-assisted ion beam etching and electron beam lithography, and have cross-sectional dimensions between 70 nm and 1.0 µm, and lengths of up to 50 µm. The free-standing wires have been examined by TEM before and after ion implantation and annealing. The results indicate that no extended defects are created in the wires, even for high doses (1016 cm-3) or high beam energies ( > 50 keV). The reason for this is not fully understood. In addition, the fabrication process has been extended so that low temperature electrical measurements can be performed on the TEM samples. In this way it is hoped eventually to study the role of specific crystalline defects in limiting the electronic and phonon transport.

This record has no associated files available for download.

More information

Published date: November 1990
Venue - Dates: conference; 1990-11-01, 1990-11-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252883
URI: http://eprints.soton.ac.uk/id/eprint/252883
ISSN: 0021-4922
PURE UUID: 791d5b3a-48ec-4064-a460-90d824345e2b

Catalogue record

Date deposited: 30 Mar 2000
Last modified: 10 Dec 2021 20:30

Export record

Contributors

Author: A Potts
Author: D A Williams
Author: R J Young
Author: R J Blaikie
Author: R A McMahon
Author: D G Hasko
Author: J R A Cleaver
Author: H Ahmed

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×