Focused Beam Implanter Trends
Burgraaf, P, Parker, G J and Thompson, W (1986) Focused Beam Implanter Trends. Semi.Intl., 82 - 83.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252962 |
| Date Deposited: | 14 Apr 2000 |
| Last Modified: | 02 Mar 2012 14:03 |
| Contributors: | Burgraaf, P (Author) Parker, G J (Author) Thompson, W (Author) |
| Date: | April 1986 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252962 |
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