Thick Selective Silicon Epitaxial Growth by LPCVD from Pure Silane
Parker, G J (1990) Thick Selective Silicon Epitaxial Growth by LPCVD from Pure Silane. Semi.Intl., 24 - 26.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252964 |
| Date Deposited: | 14 Apr 2000 |
| Last Modified: | 01 Mar 2012 10:33 |
| Contributors: | Parker, G J (Author) |
| Date: | July 1990 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252964 |
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