Selective Silicon Epitaxy without Chlorine Chemistry


Parker, G J and Starbuck, C M K (2000) Selective Silicon Epitaxy without Chlorine Chemistry. Research Journal, The University of Southampton

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Item Type: Other
ISBNs: 0854323821
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252965
Date Deposited: 14 Apr 2000
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252965

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