Selective Silicon Epitaxy without Chlorine Chemistry
Parker, G J and Starbuck, C M K (2000) Selective Silicon Epitaxy without Chlorine Chemistry. Research Journal, The University of Southampton
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| Item Type: | Other |
|---|---|
| ISBNs: | 0854323821 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252965 |
| Date Deposited: | 14 Apr 2000 |
| Last Modified: | 02 Mar 2012 12:20 |
| Contributors: | Parker, G J (Author) Starbuck, C M K (Author) |
| Date: | 14 April 2000 |
| Status: | Unpublished |
| Publisher: | Research Journal, The University of Southampton |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252965 |
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