Epitaxial Machine Yields Quality Doped Polysilicon

Hollands, J and Parker, G J (1997) Epitaxial Machine Yields Quality Doped Polysilicon. European Semiconductor, 20 - 21.


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Item Type: Other
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252970
Accepted Date and Publication Date:
February 1997Published
Date Deposited: 14 Apr 2000
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252970

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