Epitaxial Machine Yields Quality Doped Polysilicon
Hollands, J and Parker, G J (1997) Epitaxial Machine Yields Quality Doped Polysilicon. European Semiconductor, 20 - 21.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252970 |
| Date Deposited: | 14 Apr 2000 |
| Last Modified: | 02 Mar 2012 11:39 |
| Contributors: | Hollands, J (Author) Parker, G J (Author) |
| Date: | February 1997 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252970 |
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