Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers


Tenbroek, B M, Whiting, G, Lee, M S L, Edwards, C F, Redman-White, W, Uren, M J and Bunyan, R J T (1997) Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers. UNSPECIFIED

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Organisation: Proc Electrochemical Society Meeting, Paris, France
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252998
Accepted Date and Publication Date:
Status
September 1997Published
Date Deposited: 19 Apr 2000
Last Modified: 31 Mar 2016 13:53
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252998

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