A Novel Process for Deposition of Aluminium onto Sidewales of Silicon Trenches


Sehr, H, Evans, A G R, Brunnschweiler, A and Ensell, G J (2000) A Novel Process for Deposition of Aluminium onto Sidewales of Silicon Trenches. Proceedings of SPIE, 4174, 290-298.

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Item Type: Other
Additional Information: Organisation: Micromachining and Microfabrication Process Proceeding of SPIE Technology, Micromachining and Microfabrication 2000, Santa Clara, CA
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 253444
Date Deposited: 05 Jul 2001
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/253444

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