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Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane

Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane
Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane
Sehr, Harald
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Evans, A G R
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Brunnschweiler, A
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Ensell, G J
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Niblock, T E G
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Sehr, Harald
eed1b1ba-0998-4c66-8032-3e3c91f76d22
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Niblock, T E G
8baf7341-f898-43d9-877d-ebf37d231082

Sehr, Harald, Evans, A G R, Brunnschweiler, A, Ensell, G J and Niblock, T E G (2000) Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. MME2000, , Uppsala, Sweden. 01 - 03 Oct 2000.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: October 2000
Additional Information: Organisation: MME 2000, Uppsala, October 1 - 3 2000
Venue - Dates: MME2000, , Uppsala, Sweden, 2000-10-01 - 2000-10-03
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 253447
URI: http://eprints.soton.ac.uk/id/eprint/253447
PURE UUID: a0efb439-3173-40d6-a4e3-6f68bf957149

Catalogue record

Date deposited: 05 Jul 2001
Last modified: 12 Dec 2021 06:24

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Contributors

Author: Harald Sehr
Author: A G R Evans
Author: A Brunnschweiler
Author: G J Ensell
Author: T E G Niblock

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