Fabrication and Test of Thermal Vertical Bimorph Actuators for Movement in the Wafer Plane


Sehr, Harald, Evans, A G R, Brunnschweiler, A, Ensell, G J and Niblock, T E G (2000) Fabrication and Test of Thermal Vertical Bimorph Actuators for Movement in the Wafer Plane.

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Item Type: Other
Additional Information: Organisation: MME 2000, Uppsala, October 1 - 3 2000
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 253447
Date Deposited: 05 Jul 2001
Last Modified: 27 Mar 2014 19:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/253447

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