Plucked excitation of micromachined silicon resonators


Beeby, S.P., Ensell, G., Lambert, R.A. and White, N.M. (2000) Plucked excitation of micromachined silicon resonators. Electronics Letters, 36, (13), 1119-1120. (doi:10.1049/el:20000788).

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Description/Abstract

A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1049/el:20000788
ISSNs: 0013-5194
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 253676
Date :
Date Event
June 2000Published
Date Deposited: 30 Jun 2000
Last Modified: 20 Aug 2016 12:24
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/253676

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