Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors
Beeby, SP, Ross, JN and White, NM (2000) Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors. Journal of Micromechanics and Microengineering, 10, (3), 322-9.
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| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE |
| Item ID: | 253712 |
| Date Deposited: | 24 Jul 2000 |
| Last Modified: | 26 Apr 2013 02:18 |
| Contributors: | Beeby, SP (Author) Ross, JN (Author) White, NM (Author) |
| Date: | 2000 |
| Status: | Published |
| Publisher: | Institute of Physics Publishing |
| Further Information: | Google Scholar |
| ISI Citation Count: | 22 |
| URI: | http://eprints.soton.ac.uk/id/eprint/253712 |
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