Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors


Beeby, SP, Ross, JN and White, NM (2000) Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors. Journal of Micromechanics and Microengineering, 10, (3), 322-9.

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Item Type: Article
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 253712
Date Deposited: 24 Jul 2000
Last Modified: 27 Mar 2014 19:56
Further Information:Google Scholar
ISI Citation Count:23
URI: http://eprints.soton.ac.uk/id/eprint/253712

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