Design and fabrication of a low-cost microengineered siliocn pressure sensor with linearised output


Beeby, SP, Stuttle, M and White, NM (2000) Design and fabrication of a low-cost microengineered siliocn pressure sensor with linearised output. IEE Proceedings Science Measurement and Technology, 147, (3), 127-30.

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Item Type: Article
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 254081
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2000Published
Date Deposited: 13 Oct 2000
Last Modified: 31 Mar 2016 13:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/254081

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