Combined thick-film PZT/micromachined silicon accelerometer with self-test


Beeby, SP, White, NM and Grabham, N J (2000) Combined thick-film PZT/micromachined silicon accelerometer with self-test. UNSPECIFIED , 577-580.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Organisation: Proceedings of Eurosensors 2000
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 254084
Date Deposited: 21 Mar 2002
Last Modified: 27 Mar 2014 19:56
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/254084

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