Beeby, SP and White, NM (2001) Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms. Sensors and Actuators A: Physical.
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Article
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Published date: 2001
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EEE
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Local EPrints ID: 254108
URI: http://eprints.soton.ac.uk/id/eprint/254108
ISSN: 0924-4247
PURE UUID: fe9905e1-c213-48aa-99a3-474132c1ccc9
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Date deposited: 19 Oct 2000
Last modified: 09 Jan 2022 02:45
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Author:
SP Beeby
Author:
NM White
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