Mechanical design of micromachined silicon resonators
Beeby, S P and Tudor, M J (1998) Mechanical design of micromachined silicon resonators. Eurosensors XII Institute of Physics Publishing, 385-8.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | Proceedings 12th European Conference on Solida State Transducers (Eurosensors XII) Organisation: IOP Address: Bristol |
| ISBNs: | 0750305959 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 254119 |
| Date Deposited: | 11 Jul 2002 |
| Last Modified: | 26 Apr 2013 02:25 |
| Contributors: | Beeby, S P (Author) Tudor, M J (Author) White, N M (Editor) |
| Date: | 1998 |
| Additional Information: | Proceedings 12th European Conference on Solida State Transducers (Eurosensors XII) Organisation: IOP Address: Bristol |
| Status: | Published |
| Publisher: | Institute of Physics Publishing |
| Further Information: | Google Scholar |
| ISI Citation Count: | 1 |
| URI: | http://eprints.soton.ac.uk/id/eprint/254119 |
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