Thick-film printing of PZT onto silicon for micromechanical applications
Harris, N R, Beeby, S P, White, N M, Koch, M and Evans, A G R (1998) Thick-film printing of PZT onto silicon for micromechanical applications. Proc. Micromechanics Europe (MME '98) , 78-81.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 254120 |
| Date Deposited: | 09 Jul 2002 |
| Last Modified: | 02 Mar 2012 13:41 |
| Contributors: | Harris, N R (Author) Beeby, S P (Author) White, N M (Author) Koch, M (Author) Evans, A G R (Author) |
| Date: | June 1998 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/254120 |
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