Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer
Beeby, S P and White, N M (2000) Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer. Proc. Int. Conf. in Sensors and Transducers (MTEC 2000)
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 254122 |
| Date Deposited: | 25 Oct 2000 |
| Last Modified: | 01 Mar 2012 10:40 |
| Contributors: | Beeby, S P (Author) White, N M (Author) |
| Date: | February 2000 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/254122 |
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