Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer


Beeby, S P and White, N M (2000) Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer. Proc. Int. Conf. in Sensors and Transducers (MTEC 2000)

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 254122
Date :
Date Event
February 2000Published
Date Deposited: 25 Oct 2000
Last Modified: 31 Mar 2016 13:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/254122

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