Combined thick-film PZT/micromachined silicon accelerometer

Beeby, S P, Ross, J N and White, N M (2000) Combined thick-film PZT/micromachined silicon accelerometer. UNSPECIFIED , 105-112.


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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Ferroelectrics 2000, Cirencester UK. Organisation: Ferroelectrics 2000, Cirencester, UK.
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 254124
Accepted Date and Publication Date:
April 2000Published
Date Deposited: 04 Jun 2001
Last Modified: 31 Mar 2016 13:55
Further Information:Google Scholar

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