Thick-film PZT-silicon micromechanical resonator


Beeby, S P and White, N M (2000) Thick-film PZT-silicon micromechanical resonator. Electronics Letters, 36, (19), 1661-62.

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Item Type: Article
Additional Information: Address: London
ISSNs: 0013-5194
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 254129
Accepted Date and Publication Date:
Status
September 2000Published
Date Deposited: 25 Oct 2000
Last Modified: 31 Mar 2016 13:55
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/254129

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