A Monolithic surface micromachined Z-axis gyroscope with digital output


Xuesong, J, Seeger, J I, Kraft, M and Boser, B E (2000) A Monolithic surface micromachined Z-axis gyroscope with digital output. Symposium on VLSI Circuits, 16-19.

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Item Type: Article
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 255784
Date Deposited: 20 Jun 2001
Last Modified: 27 Mar 2014 19:57
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/255784

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