Modelling and optimisation of micromachined silicon resonators


Beeby, S P and Tudor, M J (1995) Modelling and optimisation of micromachined silicon resonators. Journal of Micromechanics and Microengineering, 5, 103-105.

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Item Type: Article
ISSNs: 0960-1317
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 256114
Date Deposited: 31 Oct 2001
Last Modified: 27 Mar 2014 19:58
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/256114

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