Modelling and optimisation of micromachined silicon resonators
Beeby, S P and Tudor, M J (1995) Modelling and optimisation of micromachined silicon resonators. Journal of Micromechanics and Microengineering, 5, 103-105.
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| Item Type: | Article |
|---|---|
| ISSNs: | 0960-1317 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 256114 |
| Date Deposited: | 31 Oct 2001 |
| Last Modified: | 01 Mar 2012 10:45 |
| Contributors: | Beeby, S P (Author) Tudor, M J (Author) |
| Date: | 1995 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/256114 |
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