Fundamentals and state of the art
Fundamentals and state of the art
Resonant sensors offer a high performance solution to many sensing applications. This paper presents a review of resonant microsensors based upon resonant structures fabricated in silicon, quartz and gallium arsenide. The methods of coupling the resonator to the measurand are discussed and example sensors for pressure, acceleration and rotation sensing applications are introduced. Important design considerations such as resonator geometry, the Q-factor, nonlinear behaviour, power consumption and packaging are analysed. Lastly the relative merits of silicon, quartz and GaAs as a resonator material are reviewed.
457-471
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
1997
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M.J. and Beeby, S.P.
(1997)
Fundamentals and state of the art.
Sensors and Materials, 9 (8), , [S&M306].
Abstract
Resonant sensors offer a high performance solution to many sensing applications. This paper presents a review of resonant microsensors based upon resonant structures fabricated in silicon, quartz and gallium arsenide. The methods of coupling the resonator to the measurand are discussed and example sensors for pressure, acceleration and rotation sensing applications are introduced. Important design considerations such as resonator geometry, the Q-factor, nonlinear behaviour, power consumption and packaging are analysed. Lastly the relative merits of silicon, quartz and GaAs as a resonator material are reviewed.
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Resonant Microsensors Fundamentals and State of the Art.pdf
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Published date: 1997
Additional Information:
Special issue: Resonant Microsensors
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EEE
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Local EPrints ID: 256117
URI: http://eprints.soton.ac.uk/id/eprint/256117
ISSN: 0914-4935
PURE UUID: 1564f1e8-855a-47fa-961e-5c2ba0037b32
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Date deposited: 31 Oct 2001
Last modified: 15 Mar 2024 02:46
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Author:
M.J. Tudor
Author:
S.P. Beeby
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