Development of a Magnetostrictive Thick-Film Material for MEMS Devices
Grabham, N.J., Beeby, S.P. and White, N.M. (2002) Development of a Magnetostrictive Thick-Film Material for MEMS Devices. Proceedings of Eurosensors XVI
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Description/Abstract
This paper presents research being carried out at the University of Southampton into the development of a magnetostrictive thick-film material, intended for use as an actuator with MEMS devices. This magnetostrictive thick-film material has been deposited onot alumina substrates, and this paper presents work on migrating the technology onto silicon and the evaluation of the resulting magnetostrictive thick-films.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 256631 |
| Date Deposited: | 20 Jun 2002 |
| Last Modified: | 01 Mar 2012 10:48 |
| Contributors: | Grabham, N.J. (Author) Beeby, S.P. (Author) White, N.M. (Author) |
| Date: | September 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/256631 |
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