Development of a Magnetostrictive Thick-Film Material for MEMS Devices
Grabham, N.J., Beeby, S.P. and White, N.M. (2002) Development of a Magnetostrictive Thick-Film Material for MEMS Devices. Proceedings of Eurosensors XVI
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This paper presents research being carried out at the University of Southampton into the development of a magnetostrictive thick-film material, intended for use as an actuator with MEMS devices. This magnetostrictive thick-film material has been deposited onot alumina substrates, and this paper presents work on migrating the technology onto silicon and the evaluation of the resulting magnetostrictive thick-films.
|Item Type:||Conference or Workshop Item (UNSPECIFIED)|
|Divisions:||Faculty of Physical and Applied Science > Electronics and Computer Science > EEE
|Date Deposited:||20 Jun 2002|
|Last Modified:||01 Mar 2012 10:48|
|Contributors:||Grabham, N.J. (Author)
Beeby, S.P. (Author)
White, N.M. (Author)
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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