Micromachined silicon resonant strain gauges fabricated using SOI wafer technology
Beeby, SP, Ensell, G, Tudor, MJ, White, NM and Baker, BR (2000) Micromachined silicon resonant strain gauges fabricated using SOI wafer technology. Journal of Microelectromechanical Systems (JMEMS), 9, (1), 104-111.
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| Item Type: | Article |
|---|---|
| ISSNs: | 1057-7157 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 256654 |
| Date Deposited: | 10 Jul 2002 |
| Last Modified: | 26 Apr 2013 02:43 |
| Contributors: | Beeby, SP (Author) Ensell, G (Author) Tudor, MJ (Author) White, NM (Author) Baker, BR (Author) |
| Date: | March 2000 |
| Status: | Published |
| Publisher: | IEEE |
| Further Information: | Google Scholar |
| ISI Citation Count: | 12 |
| URI: | http://eprints.soton.ac.uk/id/eprint/256654 |
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