Micromachined silicon resonant strain gauges fabricated using SOI wafer technology


Beeby, SP, Ensell, G, Tudor, MJ, White, NM and Baker, BR (2000) Micromachined silicon resonant strain gauges fabricated using SOI wafer technology. Journal of Microelectromechanical Systems (JMEMS), 9, (1), 104-111.

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Item Type: Article
ISSNs: 1057-7157
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 256654
Date Deposited: 10 Jul 2002
Last Modified: 27 Mar 2014 19:58
Publisher: IEEE
Further Information:Google Scholar
ISI Citation Count:12
URI: http://eprints.soton.ac.uk/id/eprint/256654

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