Resonant beam pressure sensor fabricated with silicon fusion bonding


Petersen, K, Pourahmadi, F, Brown, J, Parsons, P, Skinner, M and Tudor, M (1991) Resonant beam pressure sensor fabricated with silicon fusion bonding. UNSPECIFIED

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: pp. 664-667
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 256664
Date Deposited: 11 Jul 2002
Last Modified: 27 Mar 2014 19:58
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/256664

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