Resonant beam pressure sensor fabricated with silicon fusion bonding
Petersen, K, Pourahmadi, F, Brown, J, Parsons, P, Skinner, M and Tudor, M (1991) Resonant beam pressure sensor fabricated with silicon fusion bonding. UNSPECIFIED
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | pp. 664-667 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 256664 |
| Date Deposited: | 11 Jul 2002 |
| Last Modified: | 02 Mar 2012 11:57 |
| Contributors: | Petersen, K (Author) Pourahmadi, F (Author) Brown, J (Author) Parsons, P (Author) Skinner, M (Author) Tudor, M (Author) |
| Date: | 1991 |
| Additional Information: | pp. 664-667 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/256664 |
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