Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing
Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G (2002) Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing. Journal of Micromechanics and Microengineering, 12, 1-6.
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| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 257514 |
| Date Deposited: | 29 May 2003 |
| Last Modified: | 16 Aug 2012 03:24 |
| Contributors: | Su, Y (Author) Evans, A G R (Author) Brunnschweiler, A (Author) Ensell, G (Author) |
| Date: | 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 31 |
| URI: | http://eprints.soton.ac.uk/id/eprint/257514 |
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