Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning
Sehr, H, Evans, A G R, Ensell, G J, Brunnschweiler, A and Schabmueller, C J G (2002) Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning. Micromechanics Europe, Sinaia, Romania, 08 - 06 Oct 2002. , 27-30.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | Event Dates: 6-8th October 2002 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 257589 |
| Date Deposited: | 11 Jun 2003 |
| Last Modified: | 02 Mar 2012 13:19 |
| Contributors: | Sehr, H (Author) Evans, A G R (Author) Ensell, G J (Author) Brunnschweiler, A (Author) Schabmueller, C J G (Author) |
| Date: | 2002 |
| Additional Information: | Event Dates: 6-8th October 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/257589 |
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