Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning


Sehr, H, Evans, A G R, Ensell, G J, Brunnschweiler, A and Schabmueller, C J G (2002) Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning. Micromechanics Europe, Sinaia, Romania, 08 - 06 Oct 2002. , 27-30.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event Dates: 6-8th October 2002
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 257589
Date Deposited: 11 Jun 2003
Last Modified: 27 Mar 2014 19:59
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257589

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