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Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning

Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning
Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning
27-30
Sehr, H
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Schabmueller, C J G
1232ae8e-2c29-4ca2-853e-edf5bb14fc3c
Sehr, H
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Ensell, G J
05e24f49-3922-4e5f-9aee-1e6078650579
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Schabmueller, C J G
1232ae8e-2c29-4ca2-853e-edf5bb14fc3c

Sehr, H, Evans, A G R, Ensell, G J, Brunnschweiler, A and Schabmueller, C J G (2002) Design and Fabrication of Advanced thermal vertical bimorph actuators for micropositioning. Micromechanics Europe, Sinaia, Romania. pp. 27-30 .

Record type: Conference or Workshop Item (Other)

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More information

Published date: 2002
Additional Information: Event Dates: 6th-8th October 2002
Venue - Dates: Micromechanics Europe, Sinaia, Romania, 2002-10-07
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 257589
URI: http://eprints.soton.ac.uk/id/eprint/257589
PURE UUID: 75c956e4-01bb-424a-8956-cfc730a4cf12

Catalogue record

Date deposited: 11 Jun 2003
Last modified: 10 Dec 2021 20:51

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Contributors

Author: H Sehr
Author: A G R Evans
Author: G J Ensell
Author: A Brunnschweiler
Author: C J G Schabmueller

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