Schabmueller, C J G, Evans, A G R, Ensell, G J, Brunnschweiler, A, Sehr, H and Bu, M
Towards an electrostatic closeable reaction chamber.
In, Micromechanics Europe, Sinaia, Romania,
08 - 06 Oct 2002.
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This paper focuses on the design and fabrication of a micro-reaction chamber working as an inegrated valve. The 1 ul chamber is designed to close electrostatically, thus sealing the chamber and preventng the reactants from evaporating. The size of the chip is 7.1mm x 1.5mm
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