Time constant and lateral resonances of thermal vertical bimorph actuators


Sehr, H, Tomlin, I S, Huang, B, Beeby, S P, Evans, A G R, Brunnschweiler, A, Ensell, G J, Schabmueller, C J G and Niblock, T E G (2002) Time constant and lateral resonances of thermal vertical bimorph actuators. Journal of Micromechanics and Microengineering, 12, (4), 410-413.

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Item Type: Article
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 257593
Date Deposited: 11 Jun 2003
Last Modified: 27 Mar 2014 19:59
Further Information:Google Scholar
ISI Citation Count:17
URI: http://eprints.soton.ac.uk/id/eprint/257593

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