Time constant and lateral resonances of thermal vertical bimorph actuators
Sehr, H, Tomlin, I S, Huang, B, Beeby, S P, Evans, A G R, Brunnschweiler, A, Ensell, G J, Schabmueller, C J G and Niblock, T E G (2002) Time constant and lateral resonances of thermal vertical bimorph actuators. Journal of Micromechanics and Microengineering, 12, (4), 410-413.
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| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE |
| Item ID: | 257593 |
| Date Deposited: | 11 Jun 2003 |
| Last Modified: | 16 Aug 2012 03:25 |
| Contributors: | Sehr, H (Author) Tomlin, I S (Author) Huang, B (Author) Beeby, S P (Author) Evans, A G R (Author) Brunnschweiler, A (Author) Ensell, G J (Author) Schabmueller, C J G (Author) Niblock, T E G (Author) |
| Date: | 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 17 |
| URI: | http://eprints.soton.ac.uk/id/eprint/257593 |
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