Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing"
Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G (2002) Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing". Journal of Micromechanics and Microengineering, 12, (6), 780-785.
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| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO |
| Item ID: | 257594 |
| Date Deposited: | 11 Jun 2003 |
| Last Modified: | 16 Aug 2012 03:25 |
| Contributors: | Su, Y (Author) Evans, A G R (Author) Brunnschweiler, A (Author) Ensell, G (Author) |
| Date: | 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 31 |
| URI: | http://eprints.soton.ac.uk/id/eprint/257594 |
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