Micromachined Diaphragms with Integrated Actuation Coils
(2003) Micromachined Diaphragms with Integrated Actuation Coils. EUROSENSORS XVII,
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Description/Abstract
This paper presents a process for fabricating diaphragms, suitable for use in micromachined pumps within the field of micro-fluidics. To enable the actuation of a thick-film deposited magnetostrictive material, actuation coils are fabricated onto the non-chamber face of the diaphragms. These actuation coils are fabricated using a multilayer deposition approach compatible with micromachining processes. The selection of diaphragm and actuation region dimensions has been achieved through the use of finite element modeling. The paper also describes the fabrication process used to realize the structures.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | Event Dates: September 2003 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 257791 |
| Date Deposited: | 25 Jun 2003 |
| Last Modified: | 01 Mar 2012 10:53 |
| Contributors: | Grabham, Neil (Editor) Beeby, Stephen (Editor) White, Neil (Editor) |
| Date: | 2003 |
| Additional Information: | Event Dates: September 2003 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/257791 |
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- Micromachined Diaphragms with Integrated Actuation Coils. (deposited 25 Jun 2003) [Currently Displayed]
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