An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution.


Jiang, X, Wang, F, Kraft, Michael and Boser, B E (2002) An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution. Digest of Solid State Sensor and Actuator Workshop, Hilton Head Island of America, United States, , 202-205.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Additional Information: Event Dates: June 2002
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 257815
Date Deposited: 26 Jun 2003
Last Modified: 27 Mar 2014 20:00
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257815

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