Electroplating moulds with different thick photoresists for MEMS applications.


Kukharenka, A and Kraft, Michael (2002) Electroplating moulds with different thick photoresists for MEMS applications. In, Eurosensors XVI, Prague, , 103-104.

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Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: September 2002
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 257819
Date Deposited: 27 Oct 2004
Last Modified: 27 Mar 2014 20:00
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/257819

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