Realisation of electroplating moulds with different thick photoresists for MEMs applications.
Kukharenka, A and Kraft, Michael (2002) Realisation of electroplating moulds with different thick photoresists for MEMs applications. In, 4th International Conference on Material for Microelectronics and Nanoengineering, Espoo, Finland, , 165-168.
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|Item Type:||Conference or Workshop Item (Paper)|
|Additional Information:||Event Dates: June 2002|
|Divisions :||Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
|Accepted Date and Publication Date:||
|Date Deposited:||27 Oct 2004|
|Last Modified:||27 Mar 2014 20:00|
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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