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Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.

Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.
Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.
154-157
Gaura, E
1e179d97-c754-4d60-a0b5-4a6f51acbb79
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Gaura, E
1e179d97-c754-4d60-a0b5-4a6f51acbb79
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e

Gaura, E and Kraft, Michael (2002) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. Proceedings of 5th Conference on Modelling and Simulation of Microsystems, Puerto Rico. pp. 154-157 .

Record type: Conference or Workshop Item (Other)

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More information

Published date: 2002
Additional Information: Event Dates: April 2002
Venue - Dates: Proceedings of 5th Conference on Modelling and Simulation of Microsystems, Puerto Rico, 2002-03-31
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 257821
URI: http://eprints.soton.ac.uk/id/eprint/257821
PURE UUID: 9ae8454c-3611-4eda-a36e-3ab72d432d50

Catalogue record

Date deposited: 26 Jun 2003
Last modified: 07 Jan 2022 21:10

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Contributors

Author: E Gaura
Author: Michael Kraft

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