Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk.
Gaura, E and Kraft, Michael (2002) Analysis and design of a capacitive accelerometer based on an electrostatically levitated micro-disk. Proceedings of 5th Conference on Modelling and Simulation of Microsystems, Puerto Rico, , 154-157.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Additional Information: | Event Dates: April 2002 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 257821 |
| Date Deposited: | 26 Jun 2003 |
| Last Modified: | 01 Mar 2012 10:53 |
| Contributors: | Gaura, E (Author) Kraft, Michael (Author) |
| Date: | 2002 |
| Additional Information: | Event Dates: April 2002 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/257821 |
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